Invention Grant
- Patent Title: Acquisition and processing of data in a tomographic imaging apparatus
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Application No.: US15237309Application Date: 2016-08-15
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Publication No.: US10254419B2Publication Date: 2019-04-09
- Inventor: Andrew Kingston , Shane Latham , Adrian Sheppard , Glenn Myers , Benoit Recur , Heyang Li , Trond Karsten Varslot
- Applicant: FEI Company
- Applicant Address: US OR Hillsboro
- Assignee: FEI Company
- Current Assignee: FEI Company
- Current Assignee Address: US OR Hillsboro
- Agency: Scheinberg & Associates, P.C.
- Agent Michael O. Scheinberg
- Priority: EP15181202 20150817
- Main IPC: G01T1/29
- IPC: G01T1/29 ; G06T11/00 ; G01N23/046 ; G01N23/2204 ; H01J37/22

Abstract:
A method of investigating a specimen using a tomographic imaging apparatus using a stage for producing relative motion of a source with respect to a specimen, so as to allow the source and a detector to image the specimen along a series of different viewing axes and a processing apparatus for assembling a tomographic image of at least part of the specimen. The investigation is carried out by considering a virtual reference surface that surrounds the specimen and is substantially centered thereon, considering an incoming point of intersection of each of said viewing axes with this reference surface, thereby generating a set of such intersection points corresponding to the series of viewing axes, choosing discrete viewing axes in the series so as to cause the set to comprise a two-dimensional lattice of points located areally on the reference surface in a substantially uniform distribution.
Public/Granted literature
- US20170052264A1 NOVEL ACQUISITION AND PROCESSING OF DATA IN A TOMOGRAPHIC IMAGING APPARATUS Public/Granted day:2017-02-23
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