Invention Grant
- Patent Title: Wire bonding apparatus and wire bonding method
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Application No.: US15716525Application Date: 2017-09-27
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Publication No.: US10262968B2Publication Date: 2019-04-16
- Inventor: Shigeru Hayata , Satoshi Enokido
- Applicant: SHINKAWA LTD.
- Applicant Address: JP Tokyo
- Assignee: SHINKAWA LTD.
- Current Assignee: SHINKAWA LTD.
- Current Assignee Address: JP Tokyo
- Agency: JCIPRNET
- Priority: JP2015-072382 20150331
- Main IPC: B23K1/00
- IPC: B23K1/00 ; H01L21/00 ; H01L23/00 ; B23K1/06 ; B23K3/08 ; B23K35/02 ; B23K101/40

Abstract:
In order to easily and accurately measure an offset for wire bonding and improve precision of wire bonding, a wiring bonding apparatus includes a first imaging unit, a bonding tool, a moving mechanism, a reference member, a second imaging unit arranged on the opposite side to the bonding tool and the first imaging unit with respect to a reference surface, and a control unit. The first imaging unit detects a position of an optical axis of the first image capture unit with respect to a position of the reference member, the second imaging unit detects the position of the reference member when moving the bonding tool above the reference member according to pre-stored offset values, and detects a position of a ball-shaped tip section of a wire, and the control unit measures a change in offset between the bonding tool and the first imaging unit based on each detection result.
Public/Granted literature
- US20180090464A1 WIRE BONDING APPARATUS AND WIRE BONDING METHOD Public/Granted day:2018-03-29
Information query
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