Invention Grant
- Patent Title: Particle beam mass spectrometer and particle measurement method by means of same
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Application No.: US15518408Application Date: 2015-10-07
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Publication No.: US10283339B2Publication Date: 2019-05-07
- Inventor: Chang Joon Park , Sang Jung Ahn , Cheolsu Han , Keu Chan Lee , Seok Rae Yoon
- Applicant: KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCE
- Applicant Address: KR Daejeon
- Assignee: KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCE
- Current Assignee: KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCE
- Current Assignee Address: KR Daejeon
- Agency: STIP Law Group, LLC
- Priority: KR10-2014-0148024 20141029
- International Application: PCT/KR2015/010578 WO 20151007
- International Announcement: WO2016/068507 WO 20160506
- Main IPC: H01J49/14
- IPC: H01J49/14 ; G01N27/62 ; H01J49/26 ; H01J49/00 ; H01J49/06 ; H01J49/42
Abstract:
The present invention relates to a particle beam mass spectrometer and particle measurement method by means of same. More particularly, the present invention relates to a particle beam mass spectrometer including: a particle focusing unit focusing a particle beam induced by gas flow; an electron gun forming a charged particle beam by accelerating thermal electrons to ionize the particle beam focused by the particle focusing unit; a deflector deflecting the charged particle beam according to kinetic energy to charge ratio; and a sensing unit measuring a current induced by the deflected charged particle beam, wherein the deflector includes at least one particle beam separation electrode provided at each of opposite sides with respect to a progress axis of the charged particle beam before being deflected.
Public/Granted literature
- US20180286655A1 PARTICLE BEAM MASS SPECTROMETER AND PARTICLE MEASUREMENT METHOD BY MEANS OF SAME Public/Granted day:2018-10-04
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