A method for fabricating structures includes on a substrate includes providing a set of control parameters to an ion beam source and to a thermal source corresponding to a desired structure topology. The method also includes using directed irradiation synthesis to form nano structures and/or microstructures in a first surface area of the substrate by exposing the substrate surface to an ion beam from the ion beam source and to thermal particles from the thermal source. The ion beam having a first area of effect on the substrate surface, and the thermal particles having a second area of effect on the substrate surface, each of the first area of effect and the second area of effect including the first surface area.