Invention Grant
- Patent Title: Position and temperature monitoring of ALD platen susceptor
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Application No.: US14774377Application Date: 2014-03-14
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Publication No.: US10312120B2Publication Date: 2019-06-04
- Inventor: Abraham Ravid , Kevin Griffin , Joseph Yudovsky , Kaushal Gangakhedkar , Dmitry A. Dzilno , Alex Minkovich
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Servilla Whitney LLC
- International Application: PCT/US2014/028988 WO 20140314
- International Announcement: WO2014/144533 WO 20140918
- Main IPC: H01L21/67
- IPC: H01L21/67 ; C23C16/44 ; H01L21/687 ; C23C16/52 ; C23C16/455 ; C23C16/458
Abstract:
Apparatus and methods of measuring and controlling the gap between a susceptor assembly and a gas distribution assembly are described. Apparatus and methods for positional control and temperature control for wafer transfer purposes are also described.
Public/Granted literature
- US20160027675A1 Position And Temperature Monitoring Of ALD Platen Susceptor Public/Granted day:2016-01-28
Information query
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