Invention Grant
- Patent Title: Laser apparatus and extreme ultraviolet light generating system
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Application No.: US16052659Application Date: 2018-08-02
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Publication No.: US10340654B2Publication Date: 2019-07-02
- Inventor: Seiji Nogiwa , Yasufumi Kawasuji
- Applicant: Gigaphoton Inc.
- Applicant Address: JP Tochigi
- Assignee: Gigaphoton Inc.
- Current Assignee: Gigaphoton Inc.
- Current Assignee Address: JP Tochigi
- Agency: Studebaker & Brackett PC
- Main IPC: H01S3/00
- IPC: H01S3/00 ; H01S3/131 ; G02F1/01 ; H01S3/04 ; H01S3/042 ; H05G2/00 ; H01S5/068 ; H01S3/0941 ; H01S3/13 ; H01S3/16 ; H01S5/024 ; H01S3/10

Abstract:
A laser apparatus includes a light source configured to output excitation light, an optical resonator in which laser medium is excited by the excitation light, the optical resonator being configured to output laser beam, a temperature regulator configured to adjust temperature of the light source to a standard temperature, an optical detector configured to detect output power of the laser beam, and a controller configured to change the standard temperature based on the detected output power of the laser beam.
Public/Granted literature
- US20180342849A1 LASER APPARATUS AND EXTREME ULTRAVIOLET LIGHT GENERATING SYSTEM Public/Granted day:2018-11-29
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