公开(公告)号：US10340654B2

公开(公告)日：2019-07-02

申请号：US16052659

申请日：2018-08-02

Applicant: Gigaphoton Inc.

Inventor： Seiji Nogiwa ,  Yasufumi Kawasuji

IPC: H01S3/00 ,  H01S3/131 ,  G02F1/01 ,  H01S3/04 ,  H01S3/042 ,  H05G2/00 ,  H01S5/068 ,  H01S3/0941 ,  H01S3/13 ,  H01S3/16 ,  H01S5/024 ,  H01S3/10

Abstract: A laser apparatus includes a light source configured to output excitation light, an optical resonator in which laser medium is excited by the excitation light, the optical resonator being configured to output laser beam, a temperature regulator configured to adjust temperature of the light source to a standard temperature, an optical detector configured to detect output power of the laser beam, and a controller configured to change the standard temperature based on the detected output power of the laser beam.

公开(公告)号：US09847618B2

公开(公告)日：2017-12-19

申请号：US15218294

申请日：2016-07-25

Applicant: Gigaphoton Inc.

Inventor： Seiji Nogiwa ,  Osamu Wakabayashi

IPC: H01S3/13 ,  H01S3/23 ,  G02B19/00 ,  H05G2/00 ,  H01S3/223

CPC classification number: H01S3/1305 ,  G02B19/0095 ,  G03F7/70033 ,  H01S3/13 ,  H01S3/1307 ,  H01S3/2232 ,  H01S3/2316 ,  H01S3/2366 ,  H05G2/003 ,  H05G2/008

Abstract: A laser apparatus may include a beam splitter configured to split a pulse laser beam into a first beam path and a second beam path, an optical sensor provided in the first beam path, an amplifier including an amplification region provided in the second beam path and being configured to amplify and emit the pulse laser beam incident thereon along the second beam path, a wavefront controller provided in the second beam path between the beam splitter and the amplifier, and a processor configured to receive an output signal from the optical sensor and transmit a control signal to the wavefront controller.

公开(公告)号：US11532920B2

公开(公告)日：2022-12-20

申请号：US16865803

申请日：2020-05-04

Applicant: Gigaphoton Inc.

Inventor： Seiji Nogiwa

IPC: H01S3/13 ,  H01S3/131 ,  H01S3/0941 ,  H05G2/00 ,  H01S3/06 ,  H01S3/16 ,  H01S3/08

Abstract: A laser apparatus according to the present disclosure includes an excitation light source configured to output excitation light, a laser crystal disposed on an optical path of the excitation light, a first monitor device disposed on an optical path of transmitted excitation light after having transmitted through the laser crystal to monitor the transmitted excitation light, a temperature adjustment device configured to adjust a temperature of the excitation light source to a constant temperature based on a temperature command value, and a controller configured to change the temperature command value based on a result of monitoring by the first monitor device.

公开(公告)号：US10483713B2

公开(公告)日：2019-11-19

申请号：US15698412

申请日：2017-09-07

Applicant: GIGAPHOTON INC.

Inventor： Seiji Nogiwa ,  Yasufumi Kawasuji

IPC: H01S3/0941 ,  H01S3/10 ,  H01S3/104 ,  H01S3/23 ,  H05G2/00 ,  H01S3/101

Abstract: A laser apparatus may include: a quantum cascade laser outputting, based on a supplied current, laser light at an oscillation start timing when a first delay time elapses from a current rising timing of the supplied current: an amplifier disposed in a laser light optical path, and selectively amplifying light of a predetermined wavelength to output the amplified laser light to a chamber including a plasma generation region into which a target is fed; and a laser controller controlling a third delay time, from an output timing of a laser output instruction to the current rising timing, to cause a laser light wavelength to be equal to the predetermined wavelength at an aimed timing when a second delay time elapses from the oscillation start timing, based on oscillation parameters including the first delay time, a supplied current waveform, and a device temperature of the quantum cascade laser.

公开(公告)号：US10165665B2

公开(公告)日：2018-12-25

申请号：US15454027

申请日：2017-03-09

Applicant: Gigaphoton Inc.

Inventor： Seiji Nogiwa

IPC: H05G2/00 ,  H01L21/027 ,  G03F7/20 ,  H01S5/042 ,  H01S5/06 ,  H01S5/50 ,  H01S5/34 ,  H01S5/40 ,  H01S3/223 ,  H01S3/23 ,  H01S5/024 ,  H01S5/12

Abstract: A laser beam having desired properties is output at desired timings. A laser apparatus is a laser apparatus for use with an extreme ultraviolet light generating apparatus that generates extreme ultraviolet light at a repetition frequency which is set in advance, and may be equipped with: a semiconductor laser that outputs a laser beam when a trigger signal is input thereto; an optical switch that switches between a state in which the laser beam passes therethrough and a state in which the laser beam does not pass therethrough, provided along the optical path of the laser beam; and a control unit configured to output the trigger signal to the semiconductor laser at a frequency which is an integer multiple of the repetition frequency, and to control the optical switch such that the laser beam passes therethrough at the repetition frequency.

公开(公告)号：US09647406B2

公开(公告)日：2017-05-09

申请号：US15172757

申请日：2016-06-03

Applicant: GIGAPHOTON INC.

Inventor： Takashi Suganuma ,  Takayuki Yabu ,  Osamu Wakabayashi ,  Seiji Nogiwa

IPC: H01S3/00 ,  H01S3/23 ,  H05G2/00 ,  H01S3/223

CPC classification number: H01S3/005 ,  H01S3/2232 ,  H01S3/2316 ,  H01S3/2366 ,  H05G2/005 ,  H05G2/008

Abstract: There is provided a laser unit that may include a master oscillator, a laser amplifier, and an adjuster. The master oscillator may be configured to output a laser light beam. The laser amplifier may be disposed in a light path of the laser light beam outputted from the master oscillator. The adjuster may be disposed in the light path of the laser light beam, and may be configured to adjust a beam cross-sectional shape of the laser light beam amplified by the laser amplifier to be a substantially circular shape. The beam cross-sectional shape may be at a beam waist of the laser light beam or in the vicinity of the beam waist of the laser light beam, and may be in a plane orthogonal to a light path axis.