Invention Grant
- Patent Title: High-efficiency line-forming optical systems and methods using a serrated spatial filter
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Application No.: US15210399Application Date: 2016-07-14
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Publication No.: US10353208B2Publication Date: 2019-07-16
- Inventor: Serguei Anikitchev
- Applicant: Ultratech, Inc.
- Applicant Address: US CA San Jose
- Assignee: Ultratech, Inc.
- Current Assignee: Ultratech, Inc.
- Current Assignee Address: US CA San Jose
- Agency: Downs Rachlin Martin PLLC
- Main IPC: G02B27/09
- IPC: G02B27/09 ; H01L21/268 ; G02B19/00

Abstract:
High-efficiency line-forming optical systems and methods that employ a serrated aperture are disclosed. The line-forming optical system includes a laser source, a beam conditioning optical system, a first aperture device, and a relay optical system that includes a second aperture device having the serrated aperture. The serrated aperture is defined by opposing serrated blades configured to reduce intensity variations in a line image formed at an image plane as compared to using an aperture having straight-edged blades.
Public/Granted literature
- US20170025287A1 High-efficiency line-forming optical systems and methods using a serrated spatial filter Public/Granted day:2017-01-26
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