- Patent Title: Exhaust apparatus and substrate processing apparatus having an exhaust line with a first ring having at least one hole on a lateral side thereof placed in the exhaust line
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Application No.: US15672063Application Date: 2017-08-08
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Publication No.: US10364493B2Publication Date: 2019-07-30
- Inventor: Hak Joo Lee , Dae Youn Kim , Seung Wook Kim , Jin Seok Park , Jae Hyun Kim
- Applicant: ASM IP Holding B.V.
- Applicant Address: NL Almere
- Assignee: ASM IP Holding B.V.
- Current Assignee: ASM IP Holding B.V.
- Current Assignee Address: NL Almere
- Agency: Snell & Wilmer L.L.P.
- Priority: KR10-2016-0108380 20160825
- Main IPC: C23C16/44
- IPC: C23C16/44 ; C23C16/455 ; C23C16/34 ; H01J37/32
Abstract:
An exhaust apparatus using a gas curtain instead of a mechanical opening/closing structure is provided. The exhaust apparatus includes: a first region; a second region connected to the first region; a third region connected to the first region; and a first gas line connected to the second region, wherein when gas is supplied to the first gas line, the first region does not communicate with the second region but communicates with the third region.
Public/Granted literature
- US20180057937A1 EXHAUST APPARATUS, AND SUBSTRATE PROCESSING APPARATUS AND THIN FILM FABRICATING METHOD USING THE SAME Public/Granted day:2018-03-01
Information query
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