Patent search ap:("ASM IP Holding B.V.") AND inv:"Jin Seok Park" Page 1

1.

发明授权
Exhaust apparatus and substrate processing apparatus having an exhaust line with a first ring having at least one hole on a lateral side thereof placed in the exhaust line 有权

公开(公告)号：US10364493B2

公开(公告)日：2019-07-30

申请号：US15672063

申请日：2017-08-08

Applicant: ASM IP Holding B.V.

Inventor： Hak Joo Lee , Dae Youn Kim , Seung Wook Kim , Jin Seok Park , Jae Hyun Kim

IPC: C23C16/44 , C23C16/455 , C23C16/34 , H01J37/32

Abstract: An exhaust apparatus using a gas curtain instead of a mechanical opening/closing structure is provided. The exhaust apparatus includes: a first region; a second region connected to the first region; a third region connected to the first region; and a first gas line connected to the second region, wherein when gas is supplied to the first gas line, the first region does not communicate with the second region but communicates with the third region.

2.

发明申请
EXHAUST APPARATUS, AND SUBSTRATE PROCESSING APPARATUS AND THIN FILM FABRICATING METHOD USING THE SAME 审中-公开

公开(公告)号：US20180057937A1

公开(公告)日：2018-03-01

申请号：US15672063

申请日：2017-08-08

Applicant: ASM IP Holding B.V.

Inventor： Hak Joo Lee , Dae Youn Kim , Seung Wook Kim , Jin Seok Park , Jae Hyun Kim

IPC: C23C16/44 , C23C16/455

CPC classification number: C23C16/4412 , C23C16/345 , C23C16/455 , C23C16/4554 , C23C16/45544 , C23C16/45561 , H01J37/32449 , H01J37/32513 , H01J37/32834

Abstract: An exhaust apparatus using a gas curtain instead of a mechanical opening/closing structure is provided. The exhaust apparatus includes: a first region; a second region connected to the first region; a third region connected to the first region; and a first gas line connected to the second region, wherein when gas is supplied to the first gas line, the first region does not communicate with the second region but communicates with the third region.

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