Invention Grant
- Patent Title: Ion implantation apparatus and ion implantation method
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Application No.: US15905896Application Date: 2018-02-27
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Publication No.: US10381192B2Publication Date: 2019-08-13
- Inventor: Tsuyoshi Fujii , Takayuki Ito , Yasunori Oshima
- Applicant: TOSHIBA MEMORY CORPORATION
- Applicant Address: JP Minato-ku
- Assignee: TOSHIBA MEMORY CORPORATION
- Current Assignee: TOSHIBA MEMORY CORPORATION
- Current Assignee Address: JP Minato-ku
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2017-169742 20170904; JP2018-002898 20180111
- Main IPC: H01J37/08
- IPC: H01J37/08 ; H01J37/20 ; H01J37/24 ; H01J37/147 ; H01J37/317

Abstract:
In one embodiment, an ion implantation apparatus includes an ion source configured to generate an ion beam. The apparatus further includes a scanner configured to change an irradiation position with the ion beam on an irradiation target. The apparatus further includes a first electrode configured to accelerate an ion in the ion beam. The apparatus further includes a controller configured to change at least any of energy and an irradiation angle of the ion beam according to the irradiation position by controlling the ion beam having been generated from the ion source.
Public/Granted literature
- US20190074158A1 ION IMPLANTATION APPARATUS AND ION IMPLANTATION METHOD Public/Granted day:2019-03-07
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