Invention Grant
- Patent Title: Method for firing copper paste
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Application No.: US15319549Application Date: 2015-06-02
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Publication No.: US10433427B2Publication Date: 2019-10-01
- Inventor: Junichi Koike , Yuji Sutou , Daisuke Ando
- Applicant: Material Concept, Inc.
- Applicant Address: JP Sendai-Shi, Miyagi
- Assignee: MATERIAL CONCEPT, INC.
- Current Assignee: MATERIAL CONCEPT, INC.
- Current Assignee Address: JP Sendai-Shi, Miyagi
- Agency: Cantor Colburn LLP
- Priority: JP2014-123799 20140616
- International Application: PCT/JP2015/065933 WO 20150602
- International Announcement: WO2015/194366 WO 20151223
- Main IPC: H05K3/12
- IPC: H05K3/12 ; B05D3/04 ; B22F3/10 ; B05D3/02 ; H01B1/22 ; H01B5/02 ; H01B5/14 ; H01B13/00 ; H01L21/48 ; H01B1/00 ; B22F1/00

Abstract:
To provide a method for firing a copper paste, which improves sinterability of copper particles for the purpose of forming a copper wiring line that is decreased in the electrical conductivity. A method for firing a copper paste, which comprises: an application step wherein a copper paste is applied over a substrate; a first heating step wherein the substrate is heated in a nitrogen gas atmosphere containing from 500 ppm to 2,000 ppm (inclusive) of an oxidizing gas in terms of volume ratio after the application step, thereby oxidizing and sintering copper particles in the copper paste; and a second heating step wherein the substrate is heated in a nitrogen gas atmosphere containing 1% or more of a reducing gas in terms of volume ratio after the first heating step, thereby reducing the oxidized and sintered copper oxide.
Public/Granted literature
- US20170135221A1 METHOD FOR FIRING COPPER PASTE Public/Granted day:2017-05-11
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