Invention Grant
- Patent Title: Compositional optical emission spectroscopy for detection of particle induced arcs in a fabrication process
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Application No.: US15816674Application Date: 2017-11-17
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Publication No.: US10436717B2Publication Date: 2019-10-08
- Inventor: Thomas Omstead , Ke-Hung Chen , Deepak Vedhachalam
- Applicant: Tokyo Electron Limited
- Applicant Address: JP Tokyo
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP Tokyo
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Main IPC: G01N21/73
- IPC: G01N21/73 ; G01J3/443
Abstract:
Described herein are architectures, platforms and methods for detecting and analyzing anomalous events (i.e., arcing events) from spectral data gathered during a wafer fabrication process.
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