公开(公告)号：US20180143141A1

公开(公告)日：2018-05-24

申请号：US15816674

申请日：2017-11-17

Applicant: Tokyo Electron Limited

Inventor： Thomas Omstead ,  Ke-Hung Chen ,  Deepak Vedhachalam

IPC: G01N21/73 ,  G01J3/443

CPC classification number: G01N21/73 ,  G01J3/443

Abstract: Described herein are architectures, platforms and methods for detecting and analyzing anomalous events (i.e., arcing events) from spectral data gathered during a wafer fabrication process.

公开(公告)号：US10436717B2

公开(公告)日：2019-10-08

申请号：US15816674

申请日：2017-11-17

Applicant: Tokyo Electron Limited

Inventor： Thomas Omstead ,  Ke-Hung Chen ,  Deepak Vedhachalam

IPC: G01N21/73 ,  G01J3/443

Abstract: Described herein are architectures, platforms and methods for detecting and analyzing anomalous events (i.e., arcing events) from spectral data gathered during a wafer fabrication process.