Invention Grant
- Patent Title: Stacked electronic device and method for fabricating the same
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Application No.: US15057973Application Date: 2016-03-01
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Publication No.: US10483235B2Publication Date: 2019-11-19
- Inventor: Yu-Cheng Chiao , Tung-Yi Chan , Chen-Hsi Lin , Chia Hua Ho , Meng-Chang Chan , Hsin-Hung Chou
- Applicant: Winbond Electronics Corp.
- Applicant Address: TW Taichung
- Assignee: WINBOND ELECTRONICS CORP.
- Current Assignee: WINBOND ELECTRONICS CORP.
- Current Assignee Address: TW Taichung
- Agency: Muncy, Geissler, Olds & Lowe, P.C.
- Priority: CN201510230562 20150508
- Main IPC: H01L25/065
- IPC: H01L25/065

Abstract:
A method for fabricating a stacked electronic device is provided. A first three-dimensional (3D) printing is performed to form a first insulating layer and a plurality of first redistribution layers (RDLs) on a first substrate. A second 3D printing is performed to form a second substrate and a plurality of through-substrate vias (TSVs) on the first insulating layer, in which the plurality of TSVs is electrically connected to the plurality of first RDLs. A third 3D printing is performed to form a second insulating layer and a plurality of second RDLs on the second substrate, in which the plurality of second RDLs is electrically connected to the plurality of TSVs. A plurality of contacts of a third substrate is bonded to the plurality of second RDLs, so that the substrate is mounted onto the second insulating layer. The disclosure also provides a stacked electronic device formed by such a method.
Public/Granted literature
- US20160329244A1 Stacked Electronic Device and Method for Fabricating the Same Public/Granted day:2016-11-10
Information query
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