A laminated film containing at least a gas barrier layer and an inorganic polymer layer being laminated on a resin substrate, wherein concerning a distance from a surface of the inorganic polymer layer in a film thickness direction of the layer and the ratio of an oxygen atom to a total amount of a silicon atom, an oxygen atom, a carbon atom and a nitrogen atom, the ratio of a value of the oxygen atomic ratio in a region from a surface on a side opposite to the gas barrier layer up to 30% of a film thickness of the inorganic polymer layer in a depth direction to a value of the oxygen atomic ratio in a region from 30% of a film thickness of the inorganic polymer layer in a depth direction up to a surface on a side of the gas barrier layer is 1.05 or more.