Invention Grant
- Patent Title: MEMS sensor with offset anchor load rejection
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Application No.: US15828323Application Date: 2017-11-30
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Publication No.: US10571268B2Publication Date: 2020-02-25
- Inventor: Matthew Thompson , Houri Johari-Galle , Leonardo Baldasarre , Sarah Nitzan , Kirt Williams
- Applicant: InvenSense, Inc.
- Applicant Address: US CA San Jose
- Assignee: InvenSense, Inc.
- Current Assignee: InvenSense, Inc.
- Current Assignee Address: US CA San Jose
- Agency: Haley Guiliano LLP
- Agent Joshua Van Hoven; Maryam Imam
- Main IPC: G01P15/125
- IPC: G01P15/125 ; G01C19/5783 ; G01C19/5712 ; B81B3/00

Abstract:
A MEMS sensor includes a MEMS layer, a cap layer, and a substrate layer. The MEMS layer includes a suspended spring-mass system that moves in response to a sensed inertial force. The suspended spring-mass system is suspended from one or more anchors. The anchors are coupled to each of the cap layer and the substrate layer by anchoring components. The anchoring components are offset such that a force applied to the cap layer or the substrate layer causes a rotation of the anchor and such that the suspended spring-mass system substantially remains within the original MEMS layer.
Public/Granted literature
- US20190162538A1 MEMS SENSOR WITH OFFSET ANCHOR LOAD REJECTION Public/Granted day:2019-05-30
Information query
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