公开(公告)号：US10571268B2

公开(公告)日：2020-02-25

申请号：US15828323

申请日：2017-11-30

Applicant: InvenSense, Inc.

Inventor： Matthew Thompson ,  Houri Johari-Galle ,  Leonardo Baldasarre ,  Sarah Nitzan ,  Kirt Williams

IPC: G01P15/125 ,  G01C19/5783 ,  G01C19/5712 ,  B81B3/00

Abstract: A MEMS sensor includes a MEMS layer, a cap layer, and a substrate layer. The MEMS layer includes a suspended spring-mass system that moves in response to a sensed inertial force. The suspended spring-mass system is suspended from one or more anchors. The anchors are coupled to each of the cap layer and the substrate layer by anchoring components. The anchoring components are offset such that a force applied to the cap layer or the substrate layer causes a rotation of the anchor and such that the suspended spring-mass system substantially remains within the original MEMS layer.

公开(公告)号：US10732196B2

公开(公告)日：2020-08-04

申请号：US15828304

申请日：2017-11-30

Applicant: InvenSense, Inc.

Inventor： Matthew Thompson ,  Houri Johari-Galle ,  Leonardo Baldasarre ,  Sarah Nitzan ,  Kirt Williams

IPC: G01P15/08 ,  B81B7/02 ,  G01P15/125 ,  B81B5/00

Abstract: A microelectromechanical (MEMS) accelerometer senses linear acceleration perpendicular to a MEMS device plane of the MEMS accelerometer based on a rotation of a proof mass out-of-plane about a rotational axis. A symmetry axis is perpendicular to the rotational axis. The proof mass includes a symmetric portion that is symmetric about the symmetry axis and that is contiguous with an asymmetric portion that is asymmetric about the symmetry axis.

公开(公告)号：US20190162747A1

公开(公告)日：2019-05-30

申请号：US15828304

申请日：2017-11-30

Applicant: InvenSense, Inc.

Inventor： Matthew Thompson ,  Houri Johari-Galle ,  Leonardo Baldasarre ,  Sarah Nitzan ,  Kirt Williams

IPC: G01P15/08 ,  B81B7/02

Abstract: A microelectromechanical (MEMS) accelerometer senses linear acceleration perpendicular to a MEMS device plane of the MEMS accelerometer based on a rotation of a proof mass out-of-plane about a rotational axis. A symmetry axis is perpendicular to the rotational axis. The proof mass includes a symmetric portion that is symmetric about the symmetry axis and that is contiguous with an asymmetric portion that is asymmetric about the symmetry axis.

公开(公告)号：US20190162538A1

公开(公告)日：2019-05-30

申请号：US15828323

申请日：2017-11-30

Applicant: InvenSense, Inc.

Inventor： Matthew Thompson ,  Houri Johari-Galle ,  Leonardo Baldasarre ,  Sarah Nitzan ,  Kirt Williams

IPC: G01C19/5712 ,  G01P15/125 ,  B81B3/00

CPC classification number: G01C19/5712 ,  B81B3/0078 ,  B81B2201/0235 ,  B81B2201/0242 ,  G01C19/5783 ,  G01P15/125

Abstract: A MEMS sensor includes a MEMS layer, a cap layer, and a substrate layer. The MEMS layer includes a suspended spring-mass system that moves in response to a sensed inertial force. The suspended spring-mass system is suspended from one or more anchors. The anchors are coupled to each of the cap layer and the substrate layer by anchoring components. The anchoring components are offset such that a force applied to the cap layer or the substrate layer causes a rotation of the anchor and such that the suspended spring-mass system substantially remains within the original MEMS layer.