Invention Grant
- Patent Title: Susceptor position and rational apparatus and methods of use
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Application No.: US15163857Application Date: 2016-05-25
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Publication No.: US10597779B2Publication Date: 2020-03-24
- Inventor: William T. Weaver , Robert Brent Vopat , Joseph Yudovsky , Jason M. Schaller
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Servilla Whitney LLC
- Main IPC: C23C16/458
- IPC: C23C16/458 ; C23C16/455 ; H01L21/687
Abstract:
Apparatus and methods for aligning large susceptors in batch processing chambers are described. Apparatus and methods for controlling the parallelism of a susceptor relative to a gas distribution assembly are also described.
Public/Granted literature
- US20160355927A1 Susceptor Position and Rotation Apparatus and Methods of Use Public/Granted day:2016-12-08
Information query
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