Invention Grant
- Patent Title: Electron microscope and method of controlling same
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Application No.: US16177634Application Date: 2018-11-01
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Publication No.: US10607803B2Publication Date: 2020-03-31
- Inventor: Masaki Mukai
- Applicant: JEOL Ltd.
- Applicant Address: JP Tokyo
- Assignee: JEOL Ltd.
- Current Assignee: JEOL Ltd.
- Current Assignee Address: JP Tokyo
- Agency: The Webb Law Firm
- Priority: JP2017-212802 20171102
- Main IPC: H01J37/05
- IPC: H01J37/05 ; H01J37/26 ; H01J37/12 ; H01J37/147

Abstract:
An electron microscope includes an electron source, an extraction electrode that extracts an electron beam emitted from the electron source, a monochromator having an energy filter that disperses the electron beam emitted from the electron source based on an energy thereof and an energy selection slit that selects the energy of the electron beam, an incident-side electrode provided between the extraction electrode and the monochromator, and an incident-side electrode controller that controls the incident-side electrode based on a change in a voltage applied to the extraction electrode.
Public/Granted literature
- US20190139734A1 Electron Microscope and Method of Controlling Same Public/Granted day:2019-05-09
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