Invention Grant
- Patent Title: Amorphous metal oxide films
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Application No.: US15510590Application Date: 2015-09-10
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Publication No.: US10668500B2Publication Date: 2020-06-02
- Inventor: Kia Liang Gregory Goh , Hong Quang Le , Ajay Kumar Kushwaha
- Applicant: Agency for Science, Technology and Research
- Applicant Address: SG Singapore
- Assignee: Agency for Science, Technology and Research
- Current Assignee: Agency for Science, Technology and Research
- Current Assignee Address: SG Singapore
- Agency: Winstead PC
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@571fe9fe
- International Application: PCT/SG2015/050311 WO 20150910
- International Announcement: WO2016/039693 WO 20160317
- Main IPC: B05D5/08
- IPC: B05D5/08 ; C03C17/25 ; G02B1/18 ; C03C23/00 ; B05D1/18 ; B05D3/02 ; B05D3/10
Abstract:
A method for preparing an amorphous metal oxide film is provided. The method comprises providing an aqueous composition comprising a metal fluorine compound; and contacting a substrate with the aqueous composition at a temperature of less than about 100° C. to obtain said amorphous metal oxide film on the substrate. An amorphous metal oxide film, and use of the amorphous metal oxide film in various applications are also provided.
Public/Granted literature
- US20170259300A1 AMORPHOUS METAL OXIDE FILMS Public/Granted day:2017-09-14
Information query
