Invention Grant
- Patent Title: Tunnel field effect transistor having anisotropic effective mass channel
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Application No.: US16201960Application Date: 2018-11-27
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Publication No.: US10680088B2Publication Date: 2020-06-09
- Inventor: Hesameddin Ilatikhameneh , Tarek Ameen Beshari , Bozidar Novakovic , Gerhard Klimeck , Rajib Rahman
- Applicant: Purdue Research Foundation
- Applicant Address: US IN West Lafayette
- Assignee: Purdue Research Foundation
- Current Assignee: Purdue Research Foundation
- Current Assignee Address: US IN West Lafayette
- Agency: Piroozi-IP, LLC
- Main IPC: H01L29/739
- IPC: H01L29/739 ; H01L29/267 ; H01L29/08 ; H01L29/10 ; H01L29/423

Abstract:
A tunnel field effect transistor (TFET) device includes a substrate, heavily doped source and drain regions disposed at opposite ends of a channel region forming a PiN or NiP structure, the channel region including a first substantially parallelogram portion having a first length defined along a longitudinal axis extending from the source region to the drain region and a second substantially parallelogram portion having a second length defined along the longitudinal axis larger than the first length, the TFET device having an effective channel length that is an average of the first and second lengths. The channel region includes a channel material with a first effective mass along a longitudinal axis extending from the source region to the drain region and a second effective mass along a lateral axis perpendicular to the longitudinal axis, the first effective mass being greater than the second effective mass.
Public/Granted literature
- US20200027974A1 TUNNEL FIELD EFFECT TRANSISTOR HAVING ANISOTROPIC EFFECTIVE MASS CHANNEL Public/Granted day:2020-01-23
Information query
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