Invention Grant
- Patent Title: High-power short-pass total internal reflection filter
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Application No.: US16165799Application Date: 2018-10-19
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Publication No.: US10691024B2Publication Date: 2020-06-23
- Inventor: Wei Zhao , Ilya Bezel
- Applicant: KLA-Tencor Corporation
- Applicant Address: US CA Milpitas
- Assignee: KLA-Tencor Corporation
- Current Assignee: KLA-Tencor Corporation
- Current Assignee Address: US CA Milpitas
- Agency: Suiter Swantz pc llo
- Main IPC: H01J61/02
- IPC: H01J61/02 ; G03F7/20 ; H05H1/24 ; H01J65/04 ; H01J23/033 ; H01J61/54

Abstract:
An apparatus for generating filtered light may include a broadband illumination source configured to generate broadband illumination and a total internal reflection (TIR) filter formed from a material at least partially transparent to the broadband illumination. The TIR filter may include one or more input faces oriented to receive the broadband illumination. The TIR filter may further be oriented to reflect wavelengths of the broadband illumination beam below a selected cutoff wavelength on one or more filtering faces as filtered broadband illumination and provide the filtered broadband illumination beam through one or more output faces. The cutoff wavelength may further be selected based on total internal reflection on the one or more faces.
Public/Granted literature
- US20190235390A1 High-Power Short-Pass Total Internal Reflection Filter Public/Granted day:2019-08-01
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