Invention Grant
- Patent Title: Ion source with tailored extraction shape
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Application No.: US16217664Application Date: 2018-12-12
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Publication No.: US10714296B2Publication Date: 2020-07-14
- Inventor: Patrick T. Heres , Denis A. Robitaille
- Applicant: Axcelis Technologies Inc.
- Applicant Address: US MA Beverly
- Assignee: Axcelis Technologies, Inc.
- Current Assignee: Axcelis Technologies, Inc.
- Current Assignee Address: US MA Beverly
- Agent Denis A. Robitaille, Esq.
- Main IPC: H01J27/02
- IPC: H01J27/02 ; H01J37/08 ; H01J37/317 ; H01J37/09

Abstract:
An ion implantation system including an ion source for use in creating an ion beam is disclosed. The ion source has an ion source arc chamber housing that confines a high density concentration of ions within the chamber housing. An extraction member defining an appropriately configured extraction aperture allows ions to exit the source arc chamber. In a preferred embodiment, the extraction member defines a tailored extraction aperture shape for modifying an ion beam profile and producing a substantially uniform beam current across a dimension of the ion beam. The extraction aperture member defines an aperture in the form of an elongated slit having a width that varies, with wide ends and a narrow middle. The midsection of the extraction aperture has a narrower width than the opposite end sections. The tailored shape of the extraction aperture includes a central portion having a first width dimension, and first and second distal portions extending from opposite sides of the central portion, the opposed distal portions having a second width dimension that is greater than the first width dimension of the central portion.
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