Invention Grant
- Patent Title: Method for producing a TEM sample
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Application No.: US16382713Application Date: 2019-04-12
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Publication No.: US10741360B2Publication Date: 2020-08-11
- Inventor: Josef Biberger , Stefan Lengweiler
- Applicant: Carl Zeiss Microscopy GmbH
- Applicant Address: DE Jena
- Assignee: Carl Zeiss Microscopy GmbH
- Current Assignee: Carl Zeiss Microscopy GmbH
- Current Assignee Address: DE Jena
- Agency: Fish & Richardson P.C.
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@45ac2e8b
- Main IPC: H01J37/304
- IPC: H01J37/304 ; H01J37/20 ; H01J37/28 ; H01J37/305 ; H01J37/317

Abstract:
In a method for producing a TEM sample, an object is fastened to an element of an object holder such that a surface to be processed of the object is arranged substantially perpendicularly to an axis of rotation of the element. An ion beam is directed at the surface to be processed at grazing incidence, wherein the element adopts different rotational positions in relation to the axis of rotation, while the ion beam is directed at the surface to be processed.
Public/Granted literature
- US20190318908A1 METHOD FOR PRODUCING A TEM SAMPLE Public/Granted day:2019-10-17
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