Invention Grant
- Patent Title: Electron beam generation and measurement
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Application No.: US16149260Application Date: 2018-10-02
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Publication No.: US10748737B2Publication Date: 2020-08-18
- Inventor: Katerina Ioakeimidi , Gildardo R. Delgado , Frances Hill , Michael E. Romero , Rudy F. Garcia
- Applicant: KLA-TENCOR CORPORATION
- Applicant Address: US CA Milpitas
- Assignee: KLA-Tencor Corporation
- Current Assignee: KLA-Tencor Corporation
- Current Assignee Address: US CA Milpitas
- Agency: Hodgson Russ LLP
- Main IPC: H01J37/073
- IPC: H01J37/073 ; H01J37/26 ; G02B27/09 ; H01J40/06 ; H01J40/18 ; H01J1/304 ; H01J19/24 ; H01J37/06 ; H01J37/28 ; H01J1/34 ; H01L21/67

Abstract:
A flat top laser beam is used to generate an electron beam with a photocathode that can include an alkali halide. The flat top profile can be generated using an optical array. The laser beam can be split into multiple laser beams or beamlets, each of which can have the flat top profile. A phosphor screen can be imaged to determine space charge effects or electron energy of the electron beam.
Public/Granted literature
- US20190108967A1 ELECTRON BEAM GENERATION AND MEASUREMENT Public/Granted day:2019-04-11
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