Invention Grant
- Patent Title: Method for operating a particle beam generator for a particle beam device and particle beam device comprising a particle beam generator
-
Application No.: US16405405Application Date: 2019-05-07
-
Publication No.: US10763076B2Publication Date: 2020-09-01
- Inventor: Giuseppe Pavia
- Applicant: Carl Zeiss Microscopy GmbH
- Applicant Address: DE Jena
- Assignee: Carl Zeiss Microscopy GmbH
- Current Assignee: Carl Zeiss Microscopy GmbH
- Current Assignee Address: DE Jena
- Agency: Muirhead and Saturnelli, LLC
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@6a6c203e
- Main IPC: H01J37/28
- IPC: H01J37/28 ; H01J27/22 ; H01J27/26 ; H01J37/153 ; G21K5/10 ; H01J37/08

Abstract:
A method for operating a particle beam generator for a particle beam device, and a particle beam device for carrying out this method, are provided. An extractor voltage may be set to an extractor value using a first variable voltage supply unit. An emission current of the particle beam generator may be measured. When the emission current of the particle beam generator decreases, a suppressor voltage applied to a suppressor electrode may be adjusted using a second variable voltage supply unit such that a specific emission current of the particle beam generator is reached or maintained. When the emission current of the particle beam generator increases, the extractor voltage applied to the extractor electrode may be adjusted using the first variable voltage supply unit such that the specific emission current of the particle beam generator is reached or maintained.
Public/Granted literature
Information query