Invention Grant
- Patent Title: High-resolution terahertz wave concentration module, scattered light detection module, and high-resolution inspection apparatus using terahertz Bessel beam
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Application No.: US16800077Application Date: 2020-02-25
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Publication No.: US10768049B2Publication Date: 2020-09-08
- Inventor: Gyeong-Sik Ok , Sung-Wook Choi , Hyun-Joo Chang
- Applicant: KOREA FOOD RESEARCH INSTITUTE
- Applicant Address: KR Wanju-Gun, Jeollabuk
- Assignee: KOREA RESEARCH INSTITUTE
- Current Assignee: KOREA RESEARCH INSTITUTE
- Current Assignee Address: KR Wanju-Gun, Jeollabuk
- Agency: Davis & Bujold PLLC
- Agent Michael J. Bujold
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@355462a4 com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@41bce8e3 com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@15004022
- Main IPC: G01J3/42
- IPC: G01J3/42 ; G01V8/10 ; G02B5/00 ; G01V8/14 ; G01N21/3581 ; G01V8/18
Abstract:
A high resolution inspection apparatus using a terahertz Bessel beam. The high resolution inspection apparatus comprises a terahertz wave generating unit for generating a terahertz wave; a Bessel beam forming unit for forming a terahertz Bessel beam at an inspection target object using a terahertz wave incident from the terahertz wave generating unit; a first lens for changing an angle of the terahertz wave radiated, when the terahertz Bessel beam is transmitted through the inspection target object, to be smaller; a second lens for concentrating the terahertz wave passing through the first lens and toward a detection unit; and a terahertz wave detection unit for detecting the terahertz wave concentrated by the second lens.
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