Invention Grant
- Patent Title: Electron beam detection element, electron microscope, and transmission electron microscope
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Application No.: US16180923Application Date: 2018-11-05
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Publication No.: US10861688B2Publication Date: 2020-12-08
- Inventor: Mizuki Nagasaki , Hidekazu Takahashi
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: JP Tokyo
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: Canon U.S.A., Inc. IP Division
- Priority: JP2017-214832 20171107
- Main IPC: H01J49/00
- IPC: H01J49/00 ; H01J49/02 ; H01J37/244 ; H01J37/26
Abstract:
An electron beam detection element includes a control unit configured to cause a diode to transition from an inactive state to an active state in response to a change of signal level of a control signal for causing an electron gun to change from an inactive state to an active state.
Public/Granted literature
- US20190139749A1 ELECTRON BEAM DETECTION ELEMENT, ELECTRON MICROSCOPE, AND TRANSMISSION ELECTRON MICROSCOPE Public/Granted day:2019-05-09
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