Invention Grant
- Patent Title: Sensing device, sensing apparatus and sensing system
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Application No.: US15804455Application Date: 2017-11-06
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Publication No.: US10890553B2Publication Date: 2021-01-12
- Inventor: Kunal Kashyap , Kun-Wei Kao , Yih-Hua Renn , Meng-Lun Tsai , Zong-Xi Chen , Hsin-Mao Liu , Jui-Hung Yeh , Hung-Chi Wang
- Applicant: EPISTAR CORPORATION
- Applicant Address: TW Hsinchu
- Assignee: EPISTAR CORPORATION
- Current Assignee: EPISTAR CORPORATION
- Current Assignee Address: TW Hsinchu
- Agency: Patterson + Sheridan, LLP
- Main IPC: G01N27/414
- IPC: G01N27/414 ; H01L29/778 ; H01L23/34 ; G01N27/02 ; H01L29/20 ; H01L29/205 ; H01L29/10 ; H01L23/31
Abstract:
A sensing device includes a first III-V compound stack and a second III-V compound stack. The first III-V compound stack has a first sensing area, and the second III-V compound stack has a second sensing area. A passivation layer fully covers the second sensing area. The first III-V compound stack is physically separated from the second III-V compound stack, and has material compositions and structures same as the second III-V compound stack.
Public/Granted literature
- US20180128761A1 SENSING DEVICE, SENSING APPARATUS AND SENSING SYSTEM Public/Granted day:2018-05-10
Information query
