Invention Grant
- Patent Title: Laser gas purifying system and laser system
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Application No.: US15953835Application Date: 2018-04-16
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Publication No.: US10892592B2Publication Date: 2021-01-12
- Inventor: Natsushi Suzuki , Masanori Yashiro , Osamu Wakabayashi
- Applicant: Gigaphoton Inc.
- Applicant Address: JP Tochigi
- Assignee: Gigaphoton Inc.
- Current Assignee: Gigaphoton Inc.
- Current Assignee Address: JP Tochigi
- Agency: Studebaker & Brackett PC
- Main IPC: H01S3/036
- IPC: H01S3/036 ; H01S3/134 ; H01S3/225

Abstract:
A laser gas purifying system to purify laser gas emitted from a laser apparatus and return purified gas to the laser apparatus may include a first pipe configured to pass the laser gas emitted from the laser apparatus, a purifying apparatus connected to the first pipe and configured to purify the laser gas emitted from the laser apparatus, a second pipe connected to the purifying apparatus and configured to return the purified gas purified by the purifying apparatus to the laser apparatus, and an exhausting device provided in at least one of the first pipe, the purifying apparatus, and the second pipe.
Public/Granted literature
- US20180241170A1 LASER GAS PURIFYING SYSTEM AND LASER SYSTEM Public/Granted day:2018-08-23
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