Invention Grant
- Patent Title: Method of sequential infiltration synthesis treatment of infiltrateable material and structures and devices formed using same
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Application No.: US16137974Application Date: 2018-09-21
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Publication No.: US10928731B2Publication Date: 2021-02-23
- Inventor: Krzysztof Kachel , David de Roest
- Applicant: ASM IP Holding B.V.
- Applicant Address: NL Almere
- Assignee: ASM IP Holding B.V.
- Current Assignee: ASM IP Holding B.V.
- Current Assignee Address: NL Almere
- Agency: Snell & Wilmer L.L.P.
- Main IPC: G03F7/16
- IPC: G03F7/16 ; C23C16/455 ; G03F1/72 ; G03F7/40 ; C23C16/40 ; C23C16/04
Abstract:
The disclosure relates to a sequential infiltration synthesis for treatment of infiltrateable material. Examples of the disclosure provide a method of forming a structure that includes providing the substrate with a infiltrateable material in a reaction chamber and infiltrating the infiltrateable material with infiltration material during one or more infiltration cycles.
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