Invention Grant
- Patent Title: Membrane support for dual backplate transducers
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Application No.: US16543970Application Date: 2019-08-19
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Publication No.: US10981780B2Publication Date: 2021-04-20
- Inventor: Wolfgang Klein , Evangelos Angelopoulos , Stefan Barzen , Marc Fueldner , Stefan Geissler , Matthias Friedrich Herrmann , Ulrich Krumbein , Konstantin Tkachuk , Giordano Tosolini , Juergen Wagner
- Applicant: Infineon Technologies AG
- Applicant Address: DE Neubiberg
- Assignee: Infineon Technologies AG
- Current Assignee: Infineon Technologies AG
- Current Assignee Address: DE Neubiberg
- Agency: Slater Matsil, LLP
- Main IPC: B81C1/00
- IPC: B81C1/00 ; B81B3/00 ; B81B7/02 ; H04R31/00 ; H04R7/02 ; H04R1/08 ; H04R7/08
Abstract:
A microfabricated structure includes a deflectable membrane, a first clamping layer on a first surface of the deflectable membrane, a second clamping layer on a second surface of the deflectable membrane, a first perforated backplate on the first clamping layer, and a second perforated backplate on the second clamping layer, wherein the first clamping layer comprises a first tapered edge portion having a negative slope between the first perforated backplate and the deflectable membrane.
Public/Granted literature
- US20210053821A1 MEMBRANE SUPPORT FOR DUAL BACKPLATE TRANSDUCERS Public/Granted day:2021-02-25
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