Invention Grant
- Patent Title: Measurement apparatus, measurement method, and computer readable medium
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Application No.: US16697180Application Date: 2019-11-27
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Publication No.: US10982949B2Publication Date: 2021-04-20
- Inventor: Kazufumi Nishida , Hitoshi Hara , Kazuki Setsuda
- Applicant: YOKOGAWA ELECTRIC CORPORATION
- Applicant Address: JP Tokyo
- Assignee: YOKOGAWA ELECTRIC CORPORATION
- Current Assignee: YOKOGAWA ELECTRIC CORPORATION
- Current Assignee Address: JP Tokyo
- Priority: JPJP2018-223533 20181129
- Main IPC: G01B11/06
- IPC: G01B11/06 ; G01N21/27 ; G01N21/64

Abstract:
A measurement apparatus includes a detection unit to detect a first light intensity of a light obtained by making a first light having a first wavelength transmitted through a measurement object, a second light intensity of a light obtained by making a second light having a second wavelength transmitted through the object, the second wavelength having a lower rate of absorption by a material of the object than the first wavelength, and a third light intensity of a light obtained by making a third light having a third wavelength transmitted through the object, the third wavelength having a lower rate of absorption by the material of the object than the first wavelength and having a lower rate of absorption by the object containing a fluid than the second wavelength, and a calculation unit to calculate the thickness of the object by using the first, second, and third light intensities.
Public/Granted literature
- US20200173767A1 MEASUREMENT APPARATUS, MEASUREMENT METHOD, AND MEASUREMENT PROGRAM Public/Granted day:2020-06-04
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