Invention Grant
- Patent Title: Multi-layer coating with diffusion barrier layer and erosion resistant layer
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Application No.: US15844335Application Date: 2017-12-15
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Publication No.: US11008653B2Publication Date: 2021-05-18
- Inventor: David Fenwick , Xiaowei Wu , Jennifer Y. Sun
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Lowenstein Sandler LLP
- Main IPC: B32B18/00
- IPC: B32B18/00 ; C23C16/455 ; C23C16/40 ; C23C14/06 ; C23C14/08 ; C23C16/34
Abstract:
A multi-layer coating for a surface of an article comprises a diffusion barrier layer and an erosion resistant layer. The diffusion barrier layer may be a nitride film including but not limited to TiNx, TaNx, Zr3N4, and TiZrxNy. The erosion resistant layer may be a rare oxide film comprising YZrxOy. The diffusion barrier layer and the erosion resistant layer may be deposited on the article's surface using a thin film deposition technique including but not limited to, ALD, PVD, and CVD.
Public/Granted literature
- US20180112311A1 MULTI-LAYER COATING WITH DIFFUSION BARRIER LAYER AND EROSION RESISTANT LAYER Public/Granted day:2018-04-26
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