Invention Grant
- Patent Title: Differential MEMS pressure sensors with a ceramic header body and methods of making differential MEMS pressure sensors
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Application No.: US16109425Application Date: 2018-08-22
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Publication No.: US11015994B2Publication Date: 2021-05-25
- Inventor: Christopher Sanden , James Joseph Mctighe , Cuong Tho Huynh
- Applicant: Rosemount Aerospace Inc.
- Applicant Address: US MN Burnsville
- Assignee: Rosemount Aerospace Inc.
- Current Assignee: Rosemount Aerospace Inc.
- Current Assignee Address: US MN Burnsville
- Agency: Locke Lord LLP
- Agent Joshua L. Jones; Scott D. Wofsy
- Main IPC: G01L13/02
- IPC: G01L13/02 ; G01L19/00 ; G01L19/06

Abstract:
A pressure sensor includes a MEMS pressure transducer with a pressure sensing diaphragm and sensor elements, an isolator diaphragm spaced apart from the pressure sensing diaphragm, and a ceramic header body. The ceramic header body has an electrical conductor and transducer aperture with the MEMS pressure transducer supported therein. The isolator diaphragm is coupled to the to the MEMS pressure transducer by a fluid and is sealably fixed to the ceramic body. The ceramic header body bounds the fluid and the electrical conductor electrically connects the MEMS pressure transducer with the external environment. Differential pressure sensors and methods of making pressure sensors are also described.
Public/Granted literature
- US20200064216A1 PRESSURE SENSORS AND METHODS OF MAKING PRESSURE SENSORS Public/Granted day:2020-02-27
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