公开(公告)号：US11015994B2

公开(公告)日：2021-05-25

申请号：US16109425

申请日：2018-08-22

Applicant: Rosemount Aerospace Inc.

Inventor： Christopher Sanden ,  James Joseph Mctighe ,  Cuong Tho Huynh

IPC: G01L13/02 ,  G01L19/00 ,  G01L19/06

Abstract: A pressure sensor includes a MEMS pressure transducer with a pressure sensing diaphragm and sensor elements, an isolator diaphragm spaced apart from the pressure sensing diaphragm, and a ceramic header body. The ceramic header body has an electrical conductor and transducer aperture with the MEMS pressure transducer supported therein. The isolator diaphragm is coupled to the to the MEMS pressure transducer by a fluid and is sealably fixed to the ceramic body. The ceramic header body bounds the fluid and the electrical conductor electrically connects the MEMS pressure transducer with the external environment. Differential pressure sensors and methods of making pressure sensors are also described.

公开(公告)号：US20200064216A1

公开(公告)日：2020-02-27

申请号：US16109425

申请日：2018-08-22

Applicant: Rosemount Aerospace Inc.

Inventor： Christopher Sanden ,  James Joseph Mctighe ,  Cuong Tho Huynh

IPC: G01L13/02 ,  G01L19/00 ,  G01L19/06

Abstract: A pressure sensor includes a MEMS pressure transducer with a pressure sensing diaphragm and sensor elements, an isolator diaphragm spaced apart from the pressure sensing diaphragm, and a ceramic header body. The ceramic header body has an electrical conductor and transducer aperture with the MEMS pressure transducer supported therein. The isolator diaphragm is coupled to the to the MEMS pressure transducer by a fluid and is sealably fixed to the ceramic body. The ceramic header body bounds the fluid and the electrical conductor electrically connects the MEMS pressure transducer with the external environment. Differential pressure sensors and methods of making pressure sensors are also described.