Ion detection system
Abstract:
An ion detection system is disclosed that comprises one or more first devices (11) configured to produce secondary electrons in response to incident ions. The one or more first devices (11) comprise a first ion collection region and a second ion collection region and are configured to produce first secondary electrons in response to one or more ions incident at the first ion collection region and to produce second secondary electrons in response to one or more ions incident at the second ion collection region. The ion detection system also comprises a first output device (14) configured to output a first signal in response to first secondary electrons produced by the one or more first devices (11) and a second output device (15) configured to output a second signal in response to second secondary electrons produced by the one or more first devices (11).
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