Invention Grant
- Patent Title: Scanning electron microscope with composite detection system and specimen detection method
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Application No.: US17054709Application Date: 2019-09-20
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Publication No.: US11145487B2Publication Date: 2021-10-12
- Inventor: Shuai Li
- Applicant: FOCUS-EBEAM TECHNOLOGY (BEIJING) CO., LTD.
- Applicant Address: CN Beijing
- Assignee: FOCUS-EBEAM TECHNOLOGY (BEIJING) CO., LTD.
- Current Assignee: FOCUS-EBEAM TECHNOLOGY (BEIJING) CO., LTD.
- Current Assignee Address: CN Beijing
- Agency: Syncoda LLC
- Agent Feng Ma
- Priority: CN201910507143.4 20190612
- International Application: PCT/CN2019/107106 WO 20190920
- International Announcement: WO2020/220569 WO 20201105
- Main IPC: H01J37/244
- IPC: H01J37/244 ; H01J37/28 ; H01J37/145

Abstract:
A scanning electron microscope with a composite detection system and a specimen detection method. The scanning electron microscope includes a composite objective lens system including an immersion magnetic lens and an electro lens, configured to focus an initial electron beam to a specimen to form a convergent beam spot; a composite detection system located in the composite objective lens system; and a detection signal amplification and analysis system. A magnetic field of the immersion magnetic lens is immersed in the specimen; the electro lens is configured to decelerate the initial electron beam and focus the initial electron beam onto the specimen, and separate BSEs from a transmission path of an X-ray; the composite detection system is located below an inner pole piece of the immersion magnetic lens, is located above the control electrode, and includes an annular BSE detector and an annular X-ray detector that have a same axis center.
Public/Granted literature
- US20210066031A1 SCANNING ELECTRON MICROSCOPE WITH COMPOSITE DETECTION SYSTEM AND SPECIMEN DETECTION METHOD Public/Granted day:2021-03-04
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