Invention Grant
- Patent Title: Sample analysis method and sample introduction device
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Application No.: US16976211Application Date: 2018-12-20
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Publication No.: US11189475B2Publication Date: 2021-11-30
- Inventor: Kenji Araki
- Applicant: SHIN-ETSU HANDOTAI CO., LTD.
- Applicant Address: JP Tokyo
- Assignee: SHIN-ETSU HANDOTAI CO., LTD.
- Current Assignee: SHIN-ETSU HANDOTAI CO., LTD.
- Current Assignee Address: JP Tokyo
- Agency: Arent Fox LLP
- Priority: JPJP2018-059225 20180327
- International Application: PCT/JP2018/046916 WO 20181220
- International Announcement: WO2019/187408 WO 20191003
- Main IPC: H01J49/00
- IPC: H01J49/00 ; H01J49/04 ; G01N27/62 ; H01J49/10 ; H05H1/30

Abstract:
A desolvation unit performs desolvation by heating after a sample solution is turned to sample mist by a nebulizer. A sample gas that contains the desolvated sample mist and a carrier gas is introduced through a sample introduction tube to a plasma torch. An addition unit for adding, to the sample introduction tube, a water-containing gas is provided. The addition unit includes a container that contains ultrapure water, a gas tube for introducing the carrier gas into the ultrapure water to cause bubbling, and a gas tube for adding the water-containing gas, to the sample introduction tube. The plasma torch generates an inductively coupled plasma under the condition that supplied power is set to a range of 550 W to 700 W. Generation of interfering molecule ions due to an element having a high ionization potential is inhibited when an element in a sample ionized by the plasma is analyzed.
Public/Granted literature
- US20210005440A1 SAMPLE ANALYSIS METHOD AND SAMPLE INTRODUCTION DEVICE Public/Granted day:2021-01-07
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