Invention Grant
- Patent Title: Multi-stage vacuum equipment with stages separation controlled by SMA actuator
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Application No.: US16973167Application Date: 2019-07-19
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Publication No.: US11239041B2Publication Date: 2022-02-01
- Inventor: Marco Urbano
- Applicant: Saes Getters S.p.A.
- Applicant Address: IT Lainate
- Assignee: Saes Getters S.p.A.
- Current Assignee: Saes Getters S.p.A.
- Current Assignee Address: IT Lainate
- Agency: Element IP, PLC
- Priority: IT1020180007349 20180719
- International Application: PCT/IB2019/056189 WO 20190719
- International Announcement: WO2020/016843 WO 20200123
- Main IPC: H01J37/00
- IPC: H01J37/00 ; H01J37/09 ; H01J37/28
Abstract:
The present invention relates to a multi-stage vacuum equipment, preferably a two-stage equipment, whose normal operation requires different pressures to be set, wherein the pressure variation may be achieved by a Shape Memory Alloy (SMA) wire movement of a suitable element. The invention further discloses a method for operating said multi-stage vacuum equipment controlled by a SMA actuator.
Public/Granted literature
- US20210249217A1 MULTI-STAGE VACUUM EQUIPMENT WITH STAGES SEPARATION CONTROLLED BY SMA ACTUATOR Public/Granted day:2021-08-12
Information query
