Invention Grant
- Patent Title: Polarization measurement with interference patterns of high spatial carrier frequency
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Application No.: US16536709Application Date: 2019-08-09
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Publication No.: US11248955B2Publication Date: 2022-02-15
- Inventor: Daesuk Kim
- Applicant: Industrial Cooperation Foundation Chonbuk National University
- Applicant Address: KR Jeonju-si
- Assignee: Industrial Cooperation Foundation Chonbuk National University
- Current Assignee: Industrial Cooperation Foundation Chonbuk National University
- Current Assignee Address: KR Jeonju-si
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: KR10-2018-0093605 20180810,KR10-2019-0088908 20190723
- Main IPC: G01J3/08
- IPC: G01J3/08 ; G01J3/02 ; G01J3/12 ; G01J3/447 ; G01J3/453
Abstract:
The present inventive concepts relate to an inspection apparatus that snapshots an interference image pattern having a high spatial carrier frequency produced from a one-piece off-axis polarimetric interferometer and that precisely and promptly measures a Stokes vector including spatial polarimetric information. The inspection apparatus dynamically measure in real-time a two-dimensional polarization information without employing a two-dimensional scanner.
Public/Granted literature
- US20200049557A1 INSPECTION APPARATUS AND INSPECTION METHOD Public/Granted day:2020-02-13
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