Invention Grant
- Patent Title: Piezoelectric micromachined ultrasonic transducers having stress relief features
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Application No.: US16219387Application Date: 2018-12-13
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Publication No.: US11292030B2Publication Date: 2022-04-05
- Inventor: David Horsley , Andre Guedes , Stefon Shelton , Richard Przybyla
- Applicant: Chirp Microsystems, Inc.
- Applicant Address: US CA Berkeley
- Assignee: Chirp Microsystems, Inc.
- Current Assignee: Chirp Microsystems, Inc.
- Current Assignee Address: US CA Berkeley
- Agency: JDI Patent
- Agent Joshua D. Isenberg; Robert A. Pullman
- Main IPC: B06B1/06
- IPC: B06B1/06 ; H01L41/053 ; H01L41/187 ; G10K9/122

Abstract:
A piezoelectric micromachined ultrasound transducer (PMUT) is disclosed. The device consists of a flexible membrane that is connected to a rigid substrate via flexures. The flexures are defined by slots etched through the perimeter of the membrane. These features release the stress present on the structural layers of the membrane, making it less sensitive to residual stress. The flexures are designed to act as torsion springs so that the membrane's vibration mode shape is highly curved in the piezoelectric actuation area, thereby increasing the electromechanical coupling.
Public/Granted literature
- US20190193116A1 PIEZOELECTRIC MICROMACHINED ULTRASONIC TRANSDUCERS HAVING STRESS RELIEF FEATURES Public/Granted day:2019-06-27
Information query
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