- Patent Title: Aminoiodosilanes and methods of synthesizing these aminoiodosilanes
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Application No.: US16838694Application Date: 2020-04-02
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Publication No.: US11312739B2Publication Date: 2022-04-26
- Inventor: Thomas H. Baum , Manish Khandelwal , David Kuiper
- Applicant: ENTEGRIS, INC.
- Applicant Address: US MA Billerica
- Assignee: ENTEGRIS, INC.
- Current Assignee: ENTEGRIS, INC.
- Current Assignee Address: US MA Billerica
- Agency: Entegris, Inc.
- Main IPC: C07F13/00
- IPC: C07F13/00 ; C07F7/10 ; B01D3/10
Abstract:
Methods of synthesizing aminoiodosilanes are disclosed. The reaction to produce the disclosed aminoiodosilanes is represented by the formula: SiI4+z(NH2R1)═SiIy(NHR1)z, wherein R1 is selected from a C1-C10 alkyl or cycloalkyl, aryl, or a hetero group; y=1 to 3; and z=4−y.
Public/Granted literature
- US20200231616A1 AMINOIODOSILANES AND METHODS OF SYNTHESIZING THESE AMINOIODOSILANES Public/Granted day:2020-07-23
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