Invention Grant
- Patent Title: Graded interface in bragg reflector
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Application No.: US16850665Application Date: 2020-04-16
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Publication No.: US11327394B2Publication Date: 2022-05-10
- Inventor: Wen Xiao , Vibhu Jindal , Weimin Li , Shuwei Liu
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Servilla Whitney LLC
- Main IPC: G03F1/24
- IPC: G03F1/24 ; G03F7/20 ; G02B5/08
Abstract:
A multilayer stack in the form of a Bragg reflector comprising a graded interfacial layer and a method of manufacturing are disclosed. The graded interfacial layer eliminates the formation of low-reflectivity interfaces in a multilayer stack and reduces roughness of interfaces in a multilayer stack.
Public/Granted literature
- US20200333700A1 Graded Interface In Bragg Reflector Public/Granted day:2020-10-22
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