Invention Grant
- Patent Title: Light guide assembly for an electron microscope
-
Application No.: US17011378Application Date: 2020-09-03
-
Publication No.: US11335536B2Publication Date: 2022-05-17
- Inventor: Marek Uncovsky , Michal Geryk , Jan Lasko
- Applicant: FEI Company
- Applicant Address: US OR Hillsboro
- Assignee: FEI Company
- Current Assignee: FEI Company
- Current Assignee Address: US OR Hillsboro
- Agent William R McCarthy, III
- Priority: EP19197530 20190916
- Main IPC: H01J37/244
- IPC: H01J37/244 ; H01J37/22 ; H01J37/28

Abstract:
An embodiment of electron microscope system is described that comprises an electron column pole piece and a light guide assembly operatively coupled together. The light guide assembly also includes one or more detectors, and a mirror with a pressure limiting aperture through which an electron beam from an electron source passes. The mirror is also configured to reflect light, as well as to collect back scattered electrons and secondary electrons.
Public/Granted literature
- US20210082659A1 LIGHT GUIDE ASSEMBLY FOR AN ELECTRON MICROSCOPE Public/Granted day:2021-03-18
Information query