公开(公告)号：US11335536B2

公开(公告)日：2022-05-17

申请号：US17011378

申请日：2020-09-03

Applicant: FEI Company

Inventor： Marek Uncovsky ,  Michal Geryk ,  Jan Lasko

IPC: H01J37/244 ,  H01J37/22 ,  H01J37/28

Abstract: An embodiment of electron microscope system is described that comprises an electron column pole piece and a light guide assembly operatively coupled together. The light guide assembly also includes one or more detectors, and a mirror with a pressure limiting aperture through which an electron beam from an electron source passes. The mirror is also configured to reflect light, as well as to collect back scattered electrons and secondary electrons.

公开(公告)号：US20170103868A1

公开(公告)日：2017-04-13

申请号：US15206523

申请日：2016-07-11

Applicant: FEI Company

Inventor： Libor Novak ,  Petr Hlavenka ,  Marek Uncovsky ,  Martin Cafourek

IPC: H01J37/244 ,  H01J37/22 ,  H01J37/20 ,  H01J37/28

CPC classification number: H01J37/244 ,  H01J37/20 ,  H01J37/226 ,  H01J37/28 ,  H01J2237/2001 ,  H01J2237/2065 ,  H01J2237/2443 ,  H01J2237/2445 ,  H01J2237/24475 ,  H01J2237/2448

Abstract: A method of examining a specimen in a Charged Particle Microscope, comprising the following steps: Providing a specimen on a specimen holder; Heating the specimen to a temperature of at least 250° C.; Directing a beam of charged particles from a source through an illuminator so as to irradiate the specimen; Using a detector to detect a flux of electrons emanating from the specimen in response to said irradiation, wherein said detector comprises: A scintillator module, which produces photons in response to impingement by electrons in said flux; A photon sensor, for sensing said photons, and is configured to: Preferentially register a first category of photons, associated with impingement of electrons on said scintillator module; Selectively suppress a second category of photons, comprising thermal radiation from the heated specimen.

公开(公告)号：US10978272B2

公开(公告)日：2021-04-13

申请号：US16579006

申请日：2019-09-23

Applicant: FEI Company

Inventor： Tomas Vystavel ,  Pavel Stejskal ,  Marek Uncovsky

IPC: H01J37/28 ,  G01B11/06

Abstract: The invention relates to a method of determining the thickness of a sample. According to this method, a diffraction pattern image of a sample of a first material is obtained. Said diffraction pattern image comprises at least image values representative for the diffraction pattern obtained for said sample. A slope of said image values is then determined. The slope is compared to a relation between the thickness of said first material and the slope of image value of a corresponding diffraction pattern image of said first material. The determined slope and said relation are used to determine the thickness of said sample.

公开(公告)号：US09153416B2

公开(公告)日：2015-10-06

申请号：US14286811

申请日：2014-05-23

Applicant: FEI Company

Inventor： Petr Hlavenka ,  Marek Uncovsky

IPC: G21K5/04 ,  H01J37/244 ,  H01J37/28 ,  G01N21/64 ,  H01J37/22

CPC classification number: H01J37/244 ,  G01N21/6447 ,  G01N2201/08 ,  H01J37/224 ,  H01J37/226 ,  H01J37/28 ,  H01J2237/2441 ,  H01J2237/2443 ,  H01J2237/2445 ,  H01J2237/26 ,  H01J2237/2605 ,  H01J2237/2802 ,  H01J2237/31749

Abstract: A method of investigating a sample using a charged-particle microscope is disclosed. By directing an imaging beam of charged particles at a sample, a resulting flux of output radiation is detected from the sample. At least a portion of the output radiation is examined using a detector, the detector comprising a Solid State Photo-Multiplier. The Solid State Photo-Multiplier is biased so that its gain is matched to the magnitude of output radiation flux.

Abstract translation: 公开了使用带电粒子显微镜研究样品的方法。 通过将带电粒子的成像光束引导到样品，从样品中检测所得到的输出辐射通量。 使用检测器检查输出辐射的至少一部分，该检测器包括固态光电倍增器。 固态光电倍增器偏置，使其增益与输出辐射通量的大小相匹配。

公开(公告)号：US20140374593A1

公开(公告)日：2014-12-25

申请号：US14286811

申请日：2014-05-23

Applicant: FEI Company

Inventor： Petr Hlavenka ,  Marek Uncovsky

IPC: H01J37/244 ,  H01J37/22 ,  G01N21/64 ,  H01J37/28

CPC classification number: H01J37/244 ,  G01N21/6447 ,  G01N2201/08 ,  H01J37/224 ,  H01J37/226 ,  H01J37/28 ,  H01J2237/2441 ,  H01J2237/2443 ,  H01J2237/2445 ,  H01J2237/26 ,  H01J2237/2605 ,  H01J2237/2802 ,  H01J2237/31749

Abstract: A method of investigating a sample using a charged-particle microscope is disclosed. By directing an imaging beam of charged particles at a sample, a resulting flux of output radiation is detected from the sample. At least a portion of the output radiation is examined using a detector, the detector comprising a Solid State Photo-Multiplier. The Solid State Photo-Multiplier is biased so that its gain is matched to the magnitude of output radiation flux.

Abstract translation: 公开了使用带电粒子显微镜研究样品的方法。 通过将带电粒子的成像光束引导到样品，从样品中检测所得到的输出辐射通量。 使用检测器检查输出辐射的至少一部分，该检测器包括固态光电倍增器。 固态光电倍增器偏置，使其增益与输出辐射通量的大小相匹配。

公开(公告)号：US20210082659A1

公开(公告)日：2021-03-18

申请号：US17011378

申请日：2020-09-03

Applicant: FEI Company

Inventor： Marek Uncovsky ,  Michal Geryk ,  Jan Lasko

IPC: H01J37/244 ,  H01J37/28 ,  H01J37/22

Abstract: An embodiment of electron microscope system is described that comprises an electron column pole piece and a light guide assembly operatively coupled together. The light guide assembly also includes one or more detectors, and a mirror with a pressure limiting aperture through which an electron beam from an electron source passes. The mirror is also configured to reflect light, as well as to collect back scattered electrons and secondary electrons.