Invention Grant
- Patent Title: Strained thin film transistors
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Application No.: US16633094Application Date: 2017-09-18
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Publication No.: US11342457B2Publication Date: 2022-05-24
- Inventor: Prashant Majhi , Willy Rachmady , Brian S. Doyle , Abhishek A. Sharma , Elijah V. Karpov , Ravi Pillarisetty , Jack T. Kavalieros
- Applicant: Intel Corporation
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: Schwabe, Williamson & Wyatt, P.C.
- International Application: PCT/US2017/052107 WO 20170918
- International Announcement: WO2019/055051 WO 20190321
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L29/66 ; H01L29/786

Abstract:
Strained thin film transistors are described. In an example, an integrated circuit structure includes a strain inducing layer on an insulator layer above a substrate. A polycrystalline channel material layer is on the strain inducing layer. A gate dielectric layer is on a first portion of the polycrystalline channel material. A gate electrode is on the gate dielectric layer, the gate electrode having a first side opposite a second side. A first conductive contact is adjacent the first side of the gate electrode, the first conductive contact on a second portion of the polycrystalline channel material. A second conductive contact adjacent the second side of the gate electrode, the second conductive contact on a third portion of the polycrystalline channel material.
Public/Granted literature
- US20200161473A1 STRAINED THIN FILM TRANSISTORS Public/Granted day:2020-05-21
Information query
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