Invention Grant
- Patent Title: Optical inspection system
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Application No.: US17117477Application Date: 2020-12-10
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Publication No.: US11346789B2Publication Date: 2022-05-31
- Inventor: Ping-Ying Wu , Chiu-Wang Chen , Yung-Chin Liu
- Applicant: MPI CORPORATION
- Applicant Address: TW Chu-Pei
- Assignee: MPI CORPORATION
- Current Assignee: MPI CORPORATION
- Current Assignee Address: TW Chu-Pei
- Agency: Birch, Stewart, Kolasch & Birch, LLP
- Priority: TW109133671 20200928
- Main IPC: G01N21/88
- IPC: G01N21/88

Abstract:
An optical inspection system includes a brightness inspection module for inspecting the brightness of a light emitting element, an integrated inspection module for inspecting the near field optical characteristic and the beam quality factor of the light emitting element, and a far field inspection module for inspecting the far field optical characteristic of the light emitting element. As a result, the optical inspection system is space-saving and capable of reducing the distance and time of the movement of the device under test.
Public/Granted literature
- US20210181120A1 OPTICAL INSPECTION SYSTEM Public/Granted day:2021-06-17
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