公开(公告)号：US11346789B2

公开(公告)日：2022-05-31

申请号：US17117477

申请日：2020-12-10

Applicant: MPI CORPORATION

Inventor： Ping-Ying Wu ,  Chiu-Wang Chen ,  Yung-Chin Liu

IPC: G01N21/88

Abstract: An optical inspection system includes a brightness inspection module for inspecting the brightness of a light emitting element, an integrated inspection module for inspecting the near field optical characteristic and the beam quality factor of the light emitting element, and a far field inspection module for inspecting the far field optical characteristic of the light emitting element. As a result, the optical inspection system is space-saving and capable of reducing the distance and time of the movement of the device under test.